Diamanta®

Vacuum system with ion-beam plasma-chemical deposition (Ion Beam CVD) of diamond-like coatings (DLC) technology

 

DIAMANTA vacuum system is intended for deposition of wear resistant diamond-like carbon (DLC) coatings on silicon and germanium substrates. DLC coatings are antireflective as well in IR range in 3-5 µm and 7-14 µm.

The method of deposition is chemical deposition of carbon from the gas phase stimulated by plasma of an ion-beam source.

 

Examples of use:

• Night vision devices
• Thermal imagers
• Pyrometers
• Optical systems for lenses

 

Technological devices:

• Ion-beam sputtering source
• Ion-beam cleaning source

 

Features:

• Unique method of DLC film deposition
• Single wave optical monitoring system
• Load-lock vacuum chamber
• Full automation of the process

 

Technical data:

Maximum substrate size	380х410 mm
Maximum substrate thickness	45 mm
Time to reach the ultimate vacuum, not more	10 hours
Ultimate residual pressure in a clean process vacuum chamber	8E-4 Pa
Time to reach the beginning of the process pressure 5E-3 Pa in clean chamber from the beginning of high-vacuum pumping (after opening the gate)	20 min
Coating thickness uniformity,  330×350 mm² area	<± 1,0 %
Weight, not more	2000 kg
Minimum coating time of filter for 3-5 µm range	2,5 hours
Minimum coating time of filter for 8-12 µm range	5 hours