Ring anode layer accelerators “Luch”

Ion-beam treatment of the surface defined as a certain effect resulting from applying ion beams (of a certain character with defined energy and ions density) to the target object.

Ions of the operation gas are generated crossed electrical and magnetic fields and their acceleration and energy are resulting from the difference of potentials within anode-cathode. Ions resulting from the working gas ionization together with drifting electrons within closed magnetic field create an anode layer. Devices comprise such physical principals are called anode layer accelerators.

Application:

Ring anode layer accelerators applied in a variety of vacuum systems (as batch as in-line types) within different technological processes while working with substrtaes up to 250 mm, like: cleaning, polishing and activation of the surface, precise ion-beam etching, films deposition on the substrate, ion-beam assisting while films depostion. Preliminary ion-beam cleaning is the most effective when applyimg before the coating deposition in one vacuum cycle.

Main tasks:

• cleaning and activation of the surface;
• precise polishing;
• deposition of functional thin films of high density: protective, dielectric, diamond-like, complecated layers compositions from variety of materials

Technical data: